JPH0248771Y2 - - Google Patents
Info
- Publication number
- JPH0248771Y2 JPH0248771Y2 JP13054586U JP13054586U JPH0248771Y2 JP H0248771 Y2 JPH0248771 Y2 JP H0248771Y2 JP 13054586 U JP13054586 U JP 13054586U JP 13054586 U JP13054586 U JP 13054586U JP H0248771 Y2 JPH0248771 Y2 JP H0248771Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning device
- clean
- air
- blowing
- local cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 33
- 238000007664 blowing Methods 0.000 claims description 21
- 238000009423 ventilation Methods 0.000 claims description 8
- 238000012545 processing Methods 0.000 description 7
- 230000003749 cleanliness Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- SAPGTCDSBGMXCD-UHFFFAOYSA-N (2-chlorophenyl)-(4-fluorophenyl)-pyrimidin-5-ylmethanol Chemical compound C=1N=CN=CC=1C(C=1C(=CC=CC=1)Cl)(O)C1=CC=C(F)C=C1 SAPGTCDSBGMXCD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13054586U JPH0248771Y2 (en]) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13054586U JPH0248771Y2 (en]) | 1986-08-27 | 1986-08-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6335414U JPS6335414U (en]) | 1988-03-07 |
| JPH0248771Y2 true JPH0248771Y2 (en]) | 1990-12-20 |
Family
ID=31028146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13054586U Expired JPH0248771Y2 (en]) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248771Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006022051A1 (ja) * | 2004-08-27 | 2006-03-02 | Taikisha Ltd. | フィルタ検査装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4525789B2 (ja) * | 2008-04-17 | 2010-08-18 | 株式会社デンソー | 作業設備および作業設備における局所クリーンルーム |
| CN102639204B (zh) * | 2009-10-30 | 2015-01-21 | 3M创新有限公司 | 过滤装置及使用方法 |
-
1986
- 1986-08-27 JP JP13054586U patent/JPH0248771Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006022051A1 (ja) * | 2004-08-27 | 2006-03-02 | Taikisha Ltd. | フィルタ検査装置 |
| US7669490B2 (en) | 2004-08-27 | 2010-03-02 | Taikisha Ltd. | Apparatus and method for testing filters in a clean room |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6335414U (en]) | 1988-03-07 |
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